摘要
提出了一种新型的基于全息光栅的CCD位移传感器 ,该系统利用CCD分辨力高、像素均匀等特点 ,对干涉条纹的移动进行精确定位 ,而且全息光栅在测量过程中又具有不受光源波长的影响、适用光谱范围宽等特点 ,实现了位移的自动精确测量。
A kind of new CCD displacement sensor based on holographic grating is made.This system carry out accurate location to interfering stripe moving using high resolution capacity and resembles plain in color characteristic of CCD,moreover,holographic grating have do not receive the wavelength of light source influence in measuring course, suitable spectrum scope wide etc.characteristic,the auto accurate measure of displacement is realized.This system has certain practical value and application prospect.
出处
《传感器技术》
CSCD
北大核心
2002年第2期8-10,14,共4页
Journal of Transducer Technology
