摘要
介绍了一种可进行动态微位移激光测量系统。该系统以He-Ne激光器为光源,配以去噪装置、判向变频系统、CCD视频信号的高速动态采集系统、微机处理系统及干涉图处理软件包等,基于位相调制的基本原理,实现了微位移的精确测量。与传统测量方法相比,其精度、误差、灵敏度及稳定度都有较大提高,并实现了微位移的全自动测量。
An laser system for testing dynamic micro-displacement automatically is introduced. lhe system is taking He-Ne laser as light source, deploies the system of eliminating noise, the system of frequency conversion and differentiating direction, the high speed development of CCD video signal gather system, the pro- cessing system of personal computer and interference picture handling software wraps, the system realize accurate measurement of micro-displacement based on phase modulation. Its precision, error, sensitivity and stability have greater raising than traditional measurement technique, the full automatic measure of micro-displacement is realized.
出处
《科学技术与工程》
2010年第7期1628-1632,共5页
Science Technology and Engineering
关键词
线阵CCD
位相调制
迈克尔逊干涉仪
微位移
干涉
linear CCD
phase modulation
Michelson interferometer
micro-displacement
interference
