摘要
综述了氮氧化硅的制备方法 ,系统介绍了无机固相反应法、化学气相沉积法和有机先驱体法制备氮氧化硅的工艺条件 ,阐述了终产品与原料和工艺条件的关系 ,并指出了各方法的优缺点和亟待解决的问题 .着重介绍了聚合物先驱体的合成方法和结构影响因素 ,并详细介绍了热分解条件对氮氧化硅陶瓷成分和性能的影响 .这对氮氧化硅陶瓷的成分设计。
Synthesis methods of silicon oxynitride ceramics are reviewed, including inorganic solid reaction, chemical vapor deposition, and organic precursor method. The relationship between ultimate products and the starting materials as well as the synthesizing technological routes is illustrated. The characteristics and prospect of each method are also evaluated respectively. Synthetic methods and structural factors of polymeric precursors are emphasized and the effect of pyrolysis condition on the composite and properties of silicon oxynitride ceramic are introduced in detail. All these factors have significant effects on composition design, synthesis and properties of silicon oxynitride.
出处
《材料科学与工艺》
EI
CAS
CSCD
2001年第4期434-441,共8页
Materials Science and Technology
基金
国家自然科学基金资助项目 ( 5 0 0 72 0 0 2 )
