摘要
通过不同Al含量的Ti Al粉末冶金靶 ,采用多弧离子镀技术制备了Ti1 xAlxN涂层 .用SEM、XRD、GAXRD以及XTEM等手段研究了涂层的组织结构及Al元素的作用 .研究表明 ,TiAlN涂层呈柱状多晶组织 ,(Ti,Al)N为涂层的主要组成相 ;随着Al含量的增加 ,涂层中的(Ti,Al)N相将减少 ,且其晶格常数将降低 .
Ti 1-x Al xN coating are deposited by multiarcion plating method with cast Ti-Al alloy and hot-press-sintered Ti-Al alloy used as the targets. The microstructure of the coating and the mechanism were studied by SEM?XRD and XTEM. The results show that the TiAlN coating has a polycrystalline columnar structure, it is mainly composed of (Ti,Al)N; The raise of Al element would decrease the formation and the lattice constant of (Ti,Al)N.
出处
《宁波大学学报（理工版）》
CAS
2001年第4期48-51,共4页
Journal of Ningbo University：Natural Science and Engineering Edition
