摘要
用四极滤质器对微光管工艺质量进行检测 ,发现工艺质量污染及制管成品率低的主要原因是由于真空机组中油蒸气污染和操作方法不正确所致。通过实验 ,本文给出了解决油蒸气污染的措施和正确排气的操作方法。建议采用一种多用途的全无油真空装置。最后对四极滤质器在微光工艺中应进一步开展的工作提出几点建议。
The solution for eliminating oil-mist pollution and the correct operation for gas-deaeration are achieved according to experiments. We suggest that a multipurpose non-oil vacuum apparatus be used. Several other suggestions for the further efforts in the process of the low-light-level devices are put forward.
出处
《应用光学》
CAS
CSCD
2001年第6期23-27,共5页
Journal of Applied Optics
关键词
四极滤质器
微光器件
油污染
油蒸气
工艺质量
检测
quadrupole impurity filter
low-light-level device
oil-pollution
oil-vapour
