摘要
采用单晶片型压电悬臂梁制作了一种双悬臂梁结构的微型夹持器 ,用作毫米级微型机器人的微操作手。该微夹持器整体尺寸为 15mm× 2mm× 2mm ,重量为 10 0mg。在分析该悬臂梁操作原理的基础上 ,选用PbNi1/ 3 Nb2 / 3 -PbZrO3 -PbTiO3 三元系压电陶瓷准同型相界的配方作为悬臂梁压电驱动材料 ,这种压电陶瓷具有高压电常数 (d3 1)和机电耦合系数 (Kp)。进一步研究了压电微夹持器的操作特性。结果表明 :5 0V电场下 ,其最大张口距离可以达到 4 0 μm ,最大夹持力为 2 5 .7× 10 -3 N。
The piezoelectric unimorphs are used to fabricate a microgripper for the millimeter size microrobot. The size of the piezoelectric microgripper is about 15mm×2mm×2mm and the weight is about 100 mg. Based on analysis of operational principle of the piezoelectric microgripper, composition of morphotropic phase boundary of the PbNi 1/3 Nb 2/3 PbZrO 3 PbTiO 3 ternary ceramics is selected to fabricate the piezoelectric microgripper. The ternary piezoelectric ceramics have high piezoelectric modulus (d 31 ) and electromechanical coupling factor (Kp). Operational properties of the piezoelectric microgripper are investigated. Results show that the microgripper can achieve tip deflection of 40μm and gripping force of 25.7×10 -3 N when voltage of 50V is applied.
出处
《光学精密工程》
EI
CAS
CSCD
2001年第6期531-534,共4页
Optics and Precision Engineering
