摘要
讨论了利用半导体或纳米制备技术和手段提供的物理空间晶格作为显微成像基准 ,对显微视觉成像系统的四维空间畸变进行提取、修正和实时标定 ,以实现视觉检测系统的精密数字成像 ,为微机械量、微几何量提供检测、评价和计量手段。对若干问题进行了详细的讨论 ,显微视觉检测是微机械量微几何量计量中最有效的方法之一 ,而精密数字成像是必须解决的问题之一。研究精密数字成像是视觉检测技术向微观检测领域发展所必须解决的科研课题。
The microscope precision digital imaging which is obtained by means of a standard object made by means of semiconductor manufacturing technology or nanotechnology approach, the extraction of four-dimensional space error of microscope vision image system, and the real-time correction and calibration to achieve precision digital imaging are discussed. An example is given for inspection of a micro structure size of 7μm. It is an important research subject for the development and application of vision inspection technology in micro-mechanical size ranging from submicrometer to 10mm.
出处
《光学精密工程》
EI
CAS
CSCD
2001年第6期511-513,共3页
Optics and Precision Engineering
