摘要
通过各向异性腐蚀硅杯实验 ,研究了四甲基氢氧化铵 ( TMAH)腐蚀液的特性 ,包括硅( 1 0 0 )面腐蚀速率与溶液浓度、温度的关系 ,不同腐蚀条件下硅杯的表面状况 ,并确定了制作硅杯的最佳工艺条件。通过测试硅杯结构多晶硅压力传感器的输出特性 ,证明了
Through experiments on silicon cup manufacturing, the characteristics of TMAH solution are discussed, including the dependence of etching rate of (100) oriented silicon crystal plane on concentration and temperature, and the surface conditions under different etching environments The optimal process conditions for manufacturing silicon cup are also obtained The experimental results demonstrate that the output characteristics of polysilicon pressure sensors with silicon cup structure are in agreement with theoretical analysis It has been shown that TMAH is a prospective anisotropic etchant in micromachining
出处
《微电子学》
CAS
CSCD
北大核心
2001年第6期422-424,共3页
Microelectronics
基金
国家自然科学基金资助项目 (6 9876 0 2 7)
