摘要
本文叙述了(CH_3)_3SiCl在激光场中分解后生成的S_1C超微粒的性质以及粉末性质随反应器压力、气体总流速、载气流速和激光平均能量等变化而改变的情况,对具有理想性能的SiC超微粒(直径≤0.03μm)的制备工艺条件选择有参考价值。
This report discussed the charactaristics of ultrafine SiC
powders which were synthesized by the decomposition of trimethylch-
lorosilane [(CH_3)_3SiCl] in the Laser radiation and discussed the inf-
luence of reactor pressure, total flow rate, N_2 flow rate and Laser sup-
plied power on the powder charactaristics. The experimental results are
very useful in search for the way of producing ultrafine SiC powders
(diameter≤0.03μm) with ideal charactaristics.
