摘要
在介绍宽光谱膜厚监控原理和评价函数的基础上 ,重点介绍系统硬件和软件组成 ,最后给出该仪器的实验结果并对其精度进行分析。
The paper presents the principle of monitoring the thickness or thin film by wideband spectrum,especially introduces the components of both hardware and software,and then analyzes the precision of the instrument and gives the result of experiment.
出处
《光学仪器》
2001年第5期36-40,共5页
Optical Instruments
