摘要
叙述了近年在北京电影机械研究所 ( BF)研发的光学薄膜元器件 ,讨论了其中的技术要点。
This paper describes several kinds of optical thin films elements manufactured Some technical points are discussed.IAD process and optical monitoring technique which have been used for many years are also introduced.
出处
《光学仪器》
2001年第5期27-35,共9页
Optical Instruments
关键词
光学薄膜
滤光片
淀积过程
optical thin film
optical filter
deposition process
