摘要
共焦法布里－珀罗干涉仪（Confocal Fabry-Perot Interferometer, CFPI）是用光学方法探 测固体表面超声振动的解调器件，它的灵敏度和稳定性决定了整个系统的灵敏度和稳定性．通 过使用干涉仪的共轭输出光，使系统探测超声振动的灵敏度可提高至少２倍；同时详细给出通 过干涉环来粗调干涉仪的共焦点，并提出使用单片机（ＭＣＳ－５１）反馈控制系统来稳定最佳工作 点的方法．利用该系统实现了对铝样品表面压电超声振动的检测，得到了较好的实验结果．
Confocal Fabry-Perot Interferometer (CFPI) is the demdulation device for surfce ultrasonic vibration detection. Its sensitivity and stability play very driportant roles in whole system. In this paper, a new detection system is introduced. By using both conjugate rays, the system sensitivity is doubled. Moreover, a single chip microcomputer (MCS-51) feedback control loop is applied to stabilize the working point at opti- mum position. The system has performed in detecting piezoelectric ultrasonic on surface of an aluminum sam- ple.
出处
《北京科技大学学报》
EI
CAS
CSCD
北大核心
2001年第5期445-448,共4页
Journal of University of Science and Technology Beijing
关键词
共焦法布里-珀罗干涉仪
超声振动探测
灵敏度
稳定性
Confocal Fabry-Perot Interferometer (CFPI)
ultrasonic vibraion deection, sensitivity
stability
