摘要
我们研制了一台实用长脉冲、非稳腔KrF准分子激光器,获得最大脉冲能量340mJ,光脉冲宽度60ns,发散角小于0.2mrad,闸流管电脉冲与光脉冲之间时间抖动小于4ns,脉冲能量稳定度小于±2％。
A long pulse, low divergent practical KrF excimer laser has been made, the ma-ximum pulse energy of which is 340mJ, the laser pulse width 60ns, and the div-ergence less than 0.2mrad.Also, the time jitter between the current pulse of thyr-aton and the light pulse is less than 4ns, the stability of pulse energy less than
出处
《量子电子学》
CSCD
1991年第2期238-242,共5页
