摘要
分析了影响较Ｘ射线接触显微成像分辨率的若干因素，如：记录过程中的辐射损伤，后续放大设备读出引进的误差，以及菲涅尔衍射效应等，并且提出改善分辨率的一些实用方法。
Several factors effecting the resolution of soft X - ray microscopic imaging by contact process were discussed. These main factors included damages during recording, subsequent errors brought by equipment in magnifying and reading and Fresnel knife - edges diffraction etc. Some practical methods were suggested for improvement of the resolution.
出处
《核技术》
CAS
CSCD
北大核心
2001年第7期591-594,共4页
Nuclear Techniques
