摘要
论述了数字光电轮廓仪的研制。以 6JA型干涉显微镜为主体 ,分别介绍了相移器设计和控制、图像采集系统、样机控制电路 。
This paper introducs the development o f surface profiling analyzer.With the 6JA interferometer as the main part,the co ntrol of the phase shifter,the image capturing system and the control circuit us ed in the instrument are proposed.Lastly,the testing result is analyzed.
出处
《光学仪器》
2001年第4期32-36,共5页
Optical Instruments
关键词
光电轮廓仪
相移器
数模转换
surface profiling analyzer
phase shifter
A /D converter
