摘要
由于正入射X光光学发展的迫切需要及超精细拋光与超薄多层膜制备技术的成就,适用于软X射线波段的光学薄膜已获得飞速发展并趋于成熟、走向市场。这一波段的光学薄膜具有十分重要面广阔的应用前景,它已成为整个光学薄膜领域中一个令人瞩目的新分支。本文介绍了这些光学薄膜的成膜与监控工艺及对其特性的测试技术,并对我国在这方面的工作进展作一个概要的回顾与展望。
Because of both the urgent need of the development of normal-incidence X-ray optics and the considerable achievements in the techniques of ultra-fine polishing and ultrathin multilayer fabricating, optical coatings for soft X-ray region have made rapid progress and matured into marketable goods. Having various important applications, these coatings which are now the focus of attention have become a new branch of the optical thin films. The methods of fabricating, monitoring and characterizing of these coatings are described in this paper. The re view and prospect on this field in our country are also given.
出处
《激光与红外》
CAS
CSCD
北大核心
1991年第5期17-21,共5页
Laser & Infrared
