摘要
本文研究了溶胶-凝胶技术中溶液浓度、PH值、匀胶转速和热处理条件对PLT薄膜性能的影响规律.用该技术在SrTiO_3和MgO单晶基片上制备了具有钙钛矿型结构的择优取向PLT薄膜.在硅单晶和石英玻璃基片上制备了钙钛矿型结构的PLT陶瓷薄膜.
The influence of solution concentration, pH value, spin speed and heat treatment on PLT thin film preparation with sol-gel processing is studied. Using such processing, highly oriented PLT thin films with perovskite type structure on SrTiO3 and MgO single crystal substrate, (100) PLT28// (100)SrTiO3 and (100) PLT28//(100) MgO, and PLT ceramic thin films with perovskite type structure on Si single crystal and quartz glass substrate have been prepared. The dielectric constant at room temperature and the breakdown strength of ceramic thin films are ε=60~150 and Eb≥ 100 kV/cm, respectively. The spontaneous polarization p., the remanant polarization pr and the coercive field Ec of PLT15 ceramic thin films are 18uC/cm2, 7.5uC/cm2 and 50kV/cm, respectively. The transparency of PLT28 ceramic thin films within the wavelength range of λ=500~1000nm is approximately 80%.
出处
《华中理工大学学报》
CSCD
北大核心
1991年第1期83-90,共8页
Journal of Huazhong University of Science and Technology
