摘要
本文用线性级联理论及基于两体碰撞近似的蒙特卡罗模拟方法研究溅射粒子的能量分布,着重讨论能谱形状及不同入射角对能谱的影响;并且给出二元靶溅射时能谱的平均能量与靶成分的关系。
In this paper, energy distributions of sputtered particles are investigated by using the linear cascade theory and Monte Carlo simulation based on the binary collision approximation. The shape of energy distributions and the dependence of energy distributions on the angle of incidence arc discussed. Furthermore the effect of two-component target composition on the mean energy of sputtered particles is presented.
出处
《核技术》
CAS
CSCD
北大核心
1991年第10期584-588,共5页
Nuclear Techniques
基金
国家高技术863资助项目
关键词
溅射
粒子
能谱
模拟
能量分布
Sputtering Linear cascade Monte Carlo simulation Energy distributions
