摘要
讨论了 CCD的主要特性及对宽带膜厚监控系统的影响 ,介绍了典型的 CCD数据采集系统。建立了一套基于 CCD的宽带膜厚监控系统 ,并对该系统进行了光谱标定及光谱补偿 ,给出了提高信噪比及减小非线性影响的处理方法。
In this paper, the character of CCD and the effect on wideband monitoring of optical film thickness have been discussed Some typical CCDs and their collecting data systems have been introduced The system of wideband monitoring of optical film thickness has been made out From the equation of diffraction grating, the method of accurately determining wavelength of pixels of CCD has been deduced The compensation of spectrum has been done The method of improving S/N and reducing nonlinearity has been found
出处
《光学技术》
CAS
CSCD
2001年第2期143-145,149,共4页
Optical Technique
关键词
CCD
光学镀膜
膜厚监控
宽带膜厚监控
CCD
optical coating
thickness monitoring
wideband monitoring of optical film thickness
