摘要
XPS和 TOF- SIMS表面分析仪器联用分析磁头臂焊接位表面有机微污染物成分 ,找出污染物的来源 ;XPS能够提供污染物中元素组成及价态信息 ,而 TOF- SIMS能够提供其分子信息。试验证明两者联用是分析表面有机微污染物强有力的手段。
The analysis of micro organic contamination on the surface of magnetic head by XPS and TOF SIMS is described in this paper. The informations of the composing elements and their valency states are obtained by XPS, and of the molecular structures by TOF SIMS. The analytical results obtained proved that the hyphenation of XPS and TOF SIMS is a very effective method for the surface micro contamination analysis and searching for the sources of the contamination in the data storage industry.
出处
《理化检验（化学分册）》
CAS
CSCD
北大核心
2001年第2期59-61,共3页
Physical Testing and Chemical Analysis(Part B:Chemical Analysis)
