期刊文献+

圆筒形压电振子及其流体转速特性实验研究

Experimental Research on Rotate Speed of Liquid in the Cylindrical Piezoelectric Vibrator
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摘要 针对流体振动抛光方法,设计并制作了一种圆筒形压电振子。振子能够实现6阶和10阶两种面内弯曲工作模态,谐振频率分别为38400Hz、93200Hz。通过合适的激励,能够形成圆筒振子内表面质点的行波运动。实验研究了圆筒芯的直径、液面高度以及激励电压对液体转速的影响。研究结果表明,液体转速随着圆筒芯直径的增大而升高。在同样实验工况下,激励电压越高,液体转速越大。振子工作于10阶模态时的液体转速明显高于6阶模态时的转速。 A iming at the polishing technology based on vibrations of liquid, a type of cylindrical piezoelectric vibrator was designed, which can generate the sixth and tenth order in-plane bending modes. The respective resonance frequencies are 38400Hz and 93200Hz. The piezoelectric vibrator can give rise to the traveling wave motion of the mass particles on the internal surface of the vibrator by applicable excitation. The experimental researches into the influence of the diameter of the cylinder's core on liquid rotational speed were carried out, as well as the influence of the height of liquid level and the excitation voltage. The experimental results show that the liquid rotational speed increases with the diameter of the cylinder's core. Under the same experimental conditions, the higher the excitation voltage, the faster the liquid speed. The liquid rotational speed of the tenth order bending modes is obviously higher than that of the sixth order bending modes.
作者 何勍 徐建立
出处 《机械设计与制造》 北大核心 2014年第6期103-104,108,共3页 Machinery Design & Manufacture
基金 国家自然基金项目资助(51075195)
关键词 圆筒形压电振子 超声振动 液体 转速 Cylindrical Piezoelectric Vibrator Ultrasonic Vibration Liquid Rotate Speed
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参考文献6

  • 1季叶,赵淳生.一种圆筒型非接触式超声电机[J].南京航空航天大学学报,2005,37(6):690-693. 被引量:10
  • 2姜春香,魏守水,白光磊,邹楠.超声行波微流体驱动模型动力学分析[J].应用基础与工程科学学报,2008,16(1):144-151. 被引量:8
  • 3Suzuki H, Hamada S, Okino T, Kondo M, Yamagata Y, Higuchi T.Uhrap- recision finishing of micro-aspheric surface by ultrasonic two-axis vibration assisted polishing[ J ].CIRP Annals-Manufacturing Technology, 2010(59 ) : 347-350.
  • 4Tso Pei-Lum, Chang Yao-Cheng.Study on chemical mechanical polishing with ultrasonic vibration.Advanced Materials Research,2010 (126- 128):311-315.
  • 5Xu Wen-hu,Lu Xin-chun,Pan Guo-shun.Ultrasonic flexural vibration assisted chemical mechanical polishing for sapphire substrate[J ].Applied Surface Science, 2010(256) : 3936-3940.
  • 6金钊.基于非接触超声电机原理的抛光振子的研究[D].锦州:辽宁工业大学,2012.

二级参考文献19

  • 1季叶,赵淳生.一种圆筒型非接触式超声电机[J].南京航空航天大学学报,2005,37(6):690-693. 被引量:10
  • 2江兴娥,魏守水.行波微流体驱动技术研究[J].微电机,2005,38(6):89-91. 被引量:6
  • 3李朝东,赵淳生.超声马达在日本的开发与应用[J].振动.测试与诊断,1996,16(2):1-6. 被引量:12
  • 4季叶 赵淳生.非接触超声电机的发展[A].西安微电机研究所.微电机技术创新与成果应用技术交流会论文集[C].青岛:西安微电机研究所,2004.131-135.
  • 5Yamazaki T, Hu J H, Nakamura K,et al. Trial construction of a noncontact ultrasonic motor with an ultrasonically levitated rotor[J]. Jpn J Appl Phys,1996,35(Part 1,5B):3286-3288.
  • 6Nyborg W L. Acoustic streaming near a boundary[J]. J Acoustic Soc Amer, 1958,30(4):459-467.
  • 7Lee C P, Wang T G. Near-boundary streaming around a small sphere due to two orthogonal streaming waves[J]. J Aeoust Soe Amer, 1989,85 (3) : 10811088.
  • 8Harrison D Jed, Flurl K, Seller K, et al. Mieromaehining a miniatured capillary electrophoresis-based chemical analysis system on a chip[J]. Science, 1993,261:895-897
  • 9Schasfoort R B M, Schlautmann S, Hendrikse J, et al. Field-effect flow control for microfabricated fluidic networks [ J ]. Science, 1999,286:942-945
  • 10Bianchi F, Ferrigno R, Girault H H. Finite element simulation of an electroosmotic-driven flow division at a T-Junction of microseale dimensions [ J ]. Analytical Chemistry, 2000,72 ( 9 ) : 1987-1993

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