摘要
简要介绍了应用于等离子隐身系统中低温冷凝泵的结构设计,并在结构设计的基础上,采用真空抽气过程中的流量连续方程和计算流体力学(CFD)方法,建立了冷凝泵进气过程的压力分析方案。分析结果表明,冷凝泵轴向压力降主要发生在节流孔附近,且节流孔存在一个最佳尺寸。分析结果为低温泵的结构优化和后续的热力学分析提供参考。
The structure design of a cryopump which is used in plasma stealth system is introduced briefly. The pressure analysis scheme of the pump with flow continuity equation and computational fluid dynamics method is established. The analysis results indicate that axial pressure drop of the pump is mainly occurred near the orifice and the orifice has optimal size. The results guide optimization of cryopump structure and follow-up thermodynamics analysis.
出处
《真空与低温》
2014年第2期116-119,共4页
Vacuum and Cryogenics
