摘要
This paper reports the performances, construction of the cryopump work -ing on Solvay-circle refrigerator. The cryopump consists of compressor, expander and pump. All parts of cryopump are made by ourselves. Its ultimate pressure: 8.4×10^-8Pa. Effective pumping speed: 2000L/s for Nitrogen, 3000L/s for hydrogen. Cool-down time: 1 hour.
This paper reports the performances, construction of the cryopump work -ing on Solvay-circle refrigerator. The cryopump consists of compressor, expander and pump. All parts of cryopump are made by ourselves. Its ultimate pressure: 8.4×10^-8Pa. Effective pumping speed: 2000L/s for Nitrogen, 3000L/s for hydrogen. Cool-down time: 1 hour.
出处
《真空》
CAS
北大核心
1991年第6期30-32,共3页
Vacuum
