摘要
介绍了一种新型的微机械电子隧穿加速度计 .利用体硅微机械加工工艺和硅 /玻璃静电键合技术成功研制出了一种三明治结构的隧穿加速度计 .为了有效减小低频噪声 ,在反馈回路里加入了振荡器和解调器 .测试结果表明 ,目前样品的分辨率约为 1 0 -6 gHz ,抗冲击能力达到 5 0g .
A novel micromachined tunneling acceleroneter is described. Using the bulk silicon fabrication technology and the silicon/glass electrostatic bonding process, a sandwich structure tunneling accelerometer was fabricated and tested. In order to reduce the low frequency noise, the feedback circuit was improved by adding oscillator and demodulator. The first prototype has a resolution of approximately 10 -6 g Hz, and can survive with at least 50 g shocking.
出处
《东南大学学报（自然科学版）》
EI
CAS
CSCD
2000年第6期23-27,共5页
Journal of Southeast University：Natural Science Edition
