摘要
用苯作为源气体 ,使用微波电子回旋共振 (ECR)等离子体气相沉积法在不同温度下制备了含氢非晶碳薄膜 ,研究了沉积温度对薄膜的直流电阻率、击穿场强的影响 ,发现它们与沉积速率密切相关 .测量了薄膜的含氢量与Raman谱 。
Hydrogenated amorphous carbon films were deposited using ECR plasma with benzene as carbon source at varying substrate temperature. The effects of deposition temperature on the resistivity and the intensity of electric break down have been investigated. The results show these properties depend on their growth conditions. The experiment results are further investigated using Raman spectra analysis.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2000年第10期2041-2046,共6页
Acta Physica Sinica
基金
江苏省自然科学基金!(批准号 :LL772 3 )
江苏省教委自然科学基金资助的课题&&
