摘要
矩形管由于自身形状的原因会造成等离子体注入的不均匀性,给内表面改性带来困难。本文基于particle-in-cell(PIC)模型采用Matlab软件对矩形管内壁等离子体离子注入进行数值仿真,主要考察了内电极形状(圆电极、三角电极、矩形电极)对管筒内壁注入剂量分布的影响。结果表明,中心圆电极、三角电极诱导的离子注入剂量呈现"M"型分布,象形矩形电极会导致长短边离子注入剂量密度产生较大差异,小尺寸矩形电极和半圆矩形组合电极会诱导离子注入剂量分布产生三个峰值和两个谷值。对不同电极注入剂量进行统计,长短边整体注入剂量均匀性最高的是小尺寸矩形电极,局部注入剂量均匀性最高的是矩形半圆组合电极。通过比较不同形状内电极离子注入过程和结果得到适用于一般形状电极的结论。
The effects of the electrode geometries, including the circular, triangular, and rectangular configurations, on the dose distribution in plasma ion implantation into the inner surfaces of a rectangular tube were modeled, simplified, and simulated, to improve the uniformity of the dose distribution. In the simulation, software package Matlab was used based on particle-in-cell model. The simulated results show that the circular and triangular electrodes produced the ＂M shaped＂, double-peak distribution of the incident ions. When the electrode is sirnilar to the rectangular tube, the difference between the ion dose distributions on the long and short sides was found to increase. The small-sized rectangular electrode and the rectangular electrode with its short sides enclosed with the two side-matching herni-circular ends result in three peaks and two valleys of the dose distributions. The statistics of the dose density show that the small-sized rectangular electrode produces higher dose uniformity; the rectangular electrode with herni-circular ends generates higher local uniformity .
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2014年第2期175-182,共8页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(51175118)
