摘要
微构件的弹性系数影响微型传感器的静态和动态力学特性 ,为了精确的测试和评定微构件的力学特性 ,利用纳米硬度计通过微悬臂梁的弯曲试验来测量其力学特性。运用该方法可精确测量微悬臂梁纳米级弯曲变形 ,在研究微悬臂梁的纯弯曲变形过程中 ,必须考虑压头在微悬臂梁上的压入以及微悬臂沿宽度方向的挠曲。试验研究表明 ,多晶硅微悬臂梁的纯挠曲与载荷成很好的线性关系 ,通过线性关系计算得到梁的弹性模量为 [1± (2 .9%～ 6 .3% ) ]× 15 6 GPa。
The validity of a novel, direct and convenient method to measure micromechanical properties by beam bending using a nanoindenter has been demonstrated. This method combines very high load resolution with nanometric precision to determine the microcantilever beam deflection. The method is described in detail. In the deflection of microbeams, the influence of the indenter tip pushing into the top of the microbeams and the curvature across its width must be considered. The elastic deflection of a polysilicon microcantilever beam is related linearly to the force and the deformation is elastic. Youngs modulus for the beam can be determined from the slope of this linear relation. The load deflection data acquired during the bending was used to determine the mechanical properties of the thin films with the measured Youngs modulus as [1± (2.9%～6.3%) ]× 156GPa .
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2001年第2期21-24,共4页
Journal of Tsinghua University(Science and Technology)
基金
中国博士点基金资助项目 !(2 0 0 0 0 0 0 338)
关键词
力学性质
微机械
薄膜
多晶硅
纳米硬度计
微悬臂梁
mechanical properties
micromechanical devices
thin films
polysilicon
nanoindentation
