摘要
为了对微米尺度薄膜材料的力学性能进行测试,开发了一套成本较低的单轴微拉伸MEMS材料力学性能测试系统。首先,根据有限元模拟优化设计测试样片,使其能够易于夹持、准确对中,以利于应力和应变的测量。接着采用三维非硅UV-LIGA微加工技术制备了Ni薄膜样片。根据单轴拉伸测试过程和硬件构成,以Visual Basic为平台编译了一套数据采集与分析系统。最后,应用该测试系统完成对电镀Ni薄膜材料性能的测试。实验结果表明,该系统能够精确测试试样应变,精度达到0.01μm,拉伸力精度达到mN级。得到的电镀Ni薄膜材料的杨氏模量约为94.5 GPa,抗拉强度约为1.76 GPa。该系统基本满足微米尺度材料单轴微拉伸力学性能测试的需要。
In order to measure the mechanical properties of micron-scale thin films,an integrated uniaxial tensile test system with lower cost is developed for measuring mechanical properties of MEMS materials.Firstly,test chips are optimized by Finite Element Method（FEM） to be gripped tightly and aligned in the pulling direction accurately.Furthermore,test chips with thin Ni films are fabricated on a glass substrate with UV-LIGA technology,which significantly reduces fabricating time and steps and eliminates the effect of wet anisotropic etching process on mechanical properties.Then,according to tensile test processes and facilities in the tensile system,a data acquiring and analysis system is designed by Visual Basic.Finally,the integrated tensile system is used to measure the mechanical properties of the Ni thin film.Experimental results show that the system precision is 0.01 μm for strain measurment,and mN level for stress measurement.Obtained Young＇s modulus and the ultimate tensile strength of the Ni thin film are about 94.5 GPa and 1.76 GPa,respectively.The integrated system with higher precision and lower cost can be used to study mechanical properties of electroplated metal materials.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2010年第5期1204-1211,共8页
Optics and Precision Engineering
基金
国家863高技术研究发展计划资助项目(No.2006AA4Z326)
微米/纳米加工国家重点实验室基金资助项目(No.9140C79030302090C79)
关键词
材料力学测试
微机电系统
单轴微拉伸
有限元模拟
UV-LIGA
杨氏模量
镍
material mechanical test
Micro-electronic-Mechanical system
uniaxial tensile test
Finish Element Method（FEM）
UV-LIGA
Young＇s modulus
nickel
