摘要
本文介绍了软X光多层膜反射镜的发展过程和应用前景。讨论了软X光多层膜计算的衍射动力学理论和薄膜光学理论。设计了周期和非周期多层膜系。用磁控溅射制备了171(?)21层周期和17层非周期Mo/Si结构反射镜。用电子束蒸发制备了256(?)21层周期Mo/Si结构反射镜。对所制样品进行了X光小角衍射实验,俄歇电子能谱分析和反射率测试,并对实验结果进行了一些讨论。
The paper describes the progress and the applied prospects of soft X-ray multilayer mirror.The period and nonperiod multilayer Syst- em are designed.In the wavelength 171(?) 21 layersperiod and 17 lay- ers nonperiod Mo/Si mirrors are fabricated by DC MCS technique.In the wavelength 256(?) 21 layers period Mo/Si mirror is also fabricated by EBV technique.X-ray little angle diffraction experiment,AES analysis and reflectivity measurement are done to samples.Discuss- ion of measurement results is given.
出处
《光学机械》
CSCD
1991年第2期52-55,共4页
