摘要
分析了互感法检测磁流变抛光液中磁性颗粒体积分数的基本原理,并研制出相应的原型装置。该方法的测量输出电压与抛光液磁性颗粒体积分数呈线性关系,磁性颗粒体积分数变化1%时输出电压变化约23.4 mV,测量结果与抛光液流量大小无关。可以实现对常用磁流变抛光液中磁性颗粒体积分数的在线检测,为实现磁流变抛光过程中抛光液成分的稳定控制提供测量基础。
Basic principle of detection of magnetic particle volume fraction in magnetorheological（ MR） polishing fluid,which is based on mutual induction is analyzed,and corresponding prototype device is researched and fabricated.Relationship between output voltage and volume fraction of polishing fluid magnetic particle is linear, output voltage changes about 23.4 mV corresponding to 1 % magnetic particle volume fraction variation,and the result of measurement has nothing to do with flow.On-line detection of volume fraction of magnetic particle in common MR polishing fluid is realized,and it provides measurement basis for stable control of component of polishing fluid in MR polishing process.
出处
《传感器与微系统》
CSCD
北大核心
2014年第3期121-124,共4页
Transducer and Microsystem Technologies
基金
国家科技重大专项资助项目(20132X04006011)
国防基础科研计划资助项目(A1520133005)
关键词
磁流变抛光液
磁性颗粒体积分数
互感
在线检测
MR polishing fluid
volume fraction of magnetic particle
mutual induction
on-line detection
