摘要
介绍一种硅应变计，通过使用同种材料、采用两种不同的工艺技术对比试验，测试结果表明，氮化硅钝化技术制造的产品性能优于常规半导体技术制作的同类产品。
A kind of silicon strain gauge is introduced. It's indicated in a contrast test that by using the same materials and different technologies, the performance of products based on using Si3N4 passivation technology are better than that based on conventional semiconductor technology.
出处
《传感器技术》
CSCD
2000年第6期40-41,共2页
Journal of Transducer Technology
