摘要
本文论述了常角法在度盘、光栅盘检测中的应用及推广价值。从理论上进行了分析,并从实验与实际检测工作的数据中得到了验证。
The applications of constant angle method to the testing of graduated disc and grating disc, and its popularization value are described in the paper. The method is analysed in theory,and has been proved by the experiments and the data obtainep in practical testing work.
出处
《光电工程》
CAS
CSCD
1991年第4期43-50,共8页
Opto-Electronic Engineering
关键词
度盘
常角测量法
光栅盘
检测
Circule inspection testers
Normal-angle measurement method
Theoretical analysis
