摘要
运用共阳极法实现不同层数玻璃／铝的阳极键合，采用MARC非线性有限元分析软件，对三层、五层、七层、九层玻璃／铝键合试件的界面力学性能进行比较分析，探讨结合处残余应力随层数增加的变化趋势，分析结果表明，由于多层结构的对称性，最大的等效应力发生在中心处的过渡层。研究结果为MEMS器件在多层封装结构的设计提供了理论依据。
Firstly, different layers of glass/metal anodic bonding experiment has been designed and prepared by using the public anodic bonding method. Secondly, the interface mechanical properties of the three layer, five layer, seven layer and nine layer glass/metal anodic bonding are analyzed by means of nonlinear finite element simulation software MARC, which is investigated the trend of residual stress with increasing layer number. The analysis results show that,due to the symmetry of the multilayer structure,transition layer maximum equivalent stress occurs at the center,the results and provide a theoretical basis of multi-layer packaging structure design in MEMS devices.
基金
基金项目：国家自然科学基金项目（51275332）,山西省研究生优秀创新项目（20123104）
关键词
阳极键合
键合层数
残余应力
有限元分析
anodic bonding
bonding layers
residual stress
finite element analysis
