摘要
利用光荧光谱及X射线双晶衍射研究了纳米压印工艺对半导体外延材料的影响。利用纳米压印工艺制作了1.55μm通信用分布反馈(DFB)半导体激光器,并对制作的器件进行了老化寿命试验。实验结果表明,采用软模版压印并不会劣化半导体外延材料的特性。制作的半导体激光器预期寿命与普通双光束曝光法制得的器件预期相当,表明纳米压印工艺制作半导体激光器是可靠的。
Abstract The influence of nanoimprint technology on the epitaxial materials is analyzed with the use of photoluminescence and X-ray diffraction. 1. 55μm distributed feedback （DFB） laser diodes for optical fiber communication are fabricated using nanoimprint technology, and then accelerating life test is applied to these devices. Results show that soft stamp nanoimprint will not lead to a serious degradation of the epitaxial materials. The lifetimes of the lasers fabricated by nanoimprint and exposure method are on the same order of magnitude, indicating that nanoimprint technology is safe and reliable to the fabrication of lasers.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2014年第2期48-54,共7页
Acta Optica Sinica
基金
国家973计划(2010CB327603)
国家863计划(2011AA010304)
武汉市科技晨光计划(2013070104010033)
关键词
集成光学
纳米压印
半导体激光器
单片光子集成电路
integrated optics~ nanoimprint~ semiconductor laser~ monolithic photonic integrated circuit
