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化学气相沉积Ti(CN)/TiC/Al_2O_3多层涂层的结构和耐磨性能 被引量:1

Microstructure and Wear Resistance of Ti(CN)/TiC/Al_2O_3 Multilayer Coating Prepared by Chemical Vapor Deposition
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摘要 采用化学气相沉积技术在42CrMo钢基体表面制备了Ti(CN)/TiC/Al2O3多层涂层,分析了多层涂层的断面形貌、元素分布和物相组成,并研究了多层涂层的显微硬度及其与基体的界面结合力、耐磨性能。结果表明:Ti(CN)/TiC/Al2O3多层涂层的结构较致密,主要由TiC0.2N0.8、TiC、α-Al2O3和Ti2O3组成,厚度约10μm,其显微硬度约2 654HV,涂层与基体间的界面结合力可达62N;与基体相比,多层涂层的平均摩擦因数约降低了23%,磨损量约减少了50%,其磨损机制为疲劳磨损和磨粒磨损。 Ti(CN)/TiC/Al2O3 multilayer coating was prepared on 42CrMo steel substrate by chemical vapor depostion(CVD) technology, and the cross-section morphology, element distribution and phase composition of the coating were analyzed, and its microhardness, adhesion and wear resistance were studied. The results show that the multilayer coating had dense structure and was composed of TIC0. 2 No. 8, TiC, a-Ale 03 and Tie 03, and its thickness was about 10 tzrn. The microhardness of the coating was approximately 2 654 HV, and the adhesion between the coating and the substrate was about 62 N. Comparing with the substrate, the average friction coefficient of the coating was decreased by 23% and the wear mass loss was reduced by 50%. The wear mechanism of the coating was fatigue wear and abrasive wear.
出处 《机械工程材料》 CAS CSCD 北大核心 2014年第2期76-81,共6页 Materials For Mechanical Engineering
基金 四川省教育厅青年基金资助项目(12ZB164) 国家"863"计划课题项目(2007AA09Z202)
关键词 Ti(CN) TIC Al2O3多层涂层 化学气相沉积 摩擦磨损 Ti(CN)/TiC/Al2O3 multilayer coating chemical vapor depostiom friction and wear
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