摘要
采用化学气相沉积法在35CrMo钢基表面制备TiC/TiN双层、TiC/Ti(CN)/TiN和TiC/Ti(CN)/TiN/Al2O3多层硬质涂层,利用扫描电子显微镜、X射线衍射仪、显微硬度计、多功能表面力学性能试验仪和摩擦磨损试验仪测试分析了涂层的组成结构、粗糙度和表面力学性能.结果表明:三种硬质涂层表面较均匀、致密,具有高硬度、低摩擦系数等特点,较大提高了35CrMo钢的耐磨擦磨损性能。相比TiC/TiN双层,多层涂层具有更好的力学和耐磨性能,其中多层TiC/Ti(CN)/TiN的摩擦系数最小,耐磨损性能最好,原因主要归于TiC/Ti(CN)/TiN涂层具有较高的显微硬度(2559HV)和良好的膜基界面结合力(70N)。
The TiC/TiN,TiC/Ti（CN）/TiN and TiC/Ti（CN）/TiN/Al2O3 multilayered hard coatings were grown by chemical vapor deposition（CVD） on substrates of 35CrMo steel.The impacts of the coating conditions on the mechanical properties of the coating were evaluated.The microstructures of the coatings were characterized with X-ray diffraction,scanning electron microscopy,and conventional mechanical probes.The results show that the three different types of the smooth and compact coating significantly improve the surface hardness,wear resistance,and friction coefficient.Compared with the TiC/TiN coating,the multilayer coatings had high wear resistance and the low friction coefficient.The TiC/Ti（CN）/TiN coatings were found to display the lowest friction coefficient and highest wear resistance among the three,possibly because of its higher micro-hardness（2559HV） and stronger interfacial adhesin（70 N）
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2013年第7期715-720,共6页
Chinese Journal of Vacuum Science and Technology
基金
四川省教育厅青年基金(12B164)
国家863计划专题课题(2007AA09Z202)
关键词
多层
硬质涂层
摩擦磨损
化学气相沉积
Multilayer
Hard coatings
Friction and wear
Chemical vapor deposition
