摘要
大口径凸非球面反射镜的检测是非球面检测中的难题，而零位补偿检测方法是精确检测大口径凸非球面反射镜的有效检测方法之一，但是随着补偿器口径的增大，在补偿器的加工和装调中难免引入误差。文章针对与球面偏差不大的凸非球面反射镜补偿检测，提出了一种用标准球面在线标定补偿器误差的方法，并对一凸非球面补偿检测中的误差进行了标定，使用标定后的补偿器对该凸非球面反射镜进行了补偿检测，并对标定误差进行了分析，标定前补偿器误差方均根值（RMS）为0．097A（波长λ=632．8nm），标定后综合检测误差RMS值小于0．0046λ，满足该凸非球面反射镜设计精度要求。
Testing of the large-aperture convex aspheric mirror is a very difficult task in the aspherical testing. The null lens compensator is one of the efficient methods for testing the large-aperture convex aspheric mirrors. However, with the aperture increasing, some unavoidable errors are induced in the fabrication and adjustment of the compensator. In this paper, a method using a standard sphere mirror is proposed to calibrate the error of the compensator. The system error in the compensator is tested and calibrated. The calibrated compensator is used to measure the large-aperture aspheric mirror. The calibration error is also analyzed. The root-mean-square （RMS） error before calibration is 0. 097 2 （wavelength λ = 632.8 nm）, which significantly deteriorates the testing calibration is smaller than 0. 0046λ, which satisfies the mirror. accuracy in the null lens testing. The final testing RMS error after designed precision requirement of the large-aperture convex aspheric
出处
《中国激光》
EI
CAS
CSCD
北大核心
2013年第B12期206-209,共4页
Chinese Journal of Lasers
基金
国家973计划（2011CB0132005）、国家自然科学基金重点项目（61036015）
关键词
测量
凸非球面反射镜检测
误差标定
标准球面
零位补偿
measurement
convex aspheric mirror testing
error calibration
standard spherical surface
null compensator
