摘要
介绍了N型金属氧化物气敏薄膜厚度效应的实验规律．给出了响应时间和恢复时间 随膜厚及气体浓度变化的规律;指出了气敏薄膜存在最佳灵敏度的膜厚和最佳晶粒尺寸的事 实；给出了低真空退火后气敏薄膜的电导激活能随膜厚变化的实验曲线．
The experimental rules of thickness effect on N type metal oxide gas sensing thin films are presented. The rule of response time and recovery time versus fil m thicknes and gas concentraction was given,the fact of optimum thickness and optimum grain size for the films and the experimental curves versus of gas seni ng thin films after vacum sintering are provided.
出处
《郑州轻工业学院学报》
2000年第4期40-42,共3页
Journal of Zhengzhou Institute of Light Industry（Natural Science）
关键词
气敏器件
薄膜
厚度
金属氧化物
响应
晶粒尺寸
gas sensitive devices
thin films
thickness
metal oxide
responses
grain siz
