摘要
在扫描电子显微镜上实现STEM模式通常需要有一个扫描透射样品座和一个扫描透射信号的接收装置.本方法是在扫描电镜样品台上安装一个自行设计的安装薄样品的样品支架,利用扫描电镜内已有的二次电子检测器来检测扫描透射电子就可以实现STEM明场像的观察和X射线能谱分析.该方法不需要在扫描电镜里另外加装透射信号接收装置.
The conventional transmitted electron detecting system consists the specimen holder and signal receiver for STEM in the SEM. The stub is designed for sustaining specimen and reflecting transmitted electrons in this method. The STEM image could be acquired using the special stub on the holder and secondary electron detector in the SEM. The examination may also be coupled with X-ray microanalysis equipment for the acquisition of elemental information and distribution. It is not need the transmitted electron detector in SEM.
出处
《北京师范大学学报（自然科学版）》
CAS
CSCD
北大核心
2013年第6期578-581,共4页
Journal of Beijing Normal University(Natural Science)
基金
中央高校基本科研业务费专项资金重大项目(212-105560GK)
