摘要
考查一下IITRI(1975)会议文集上的照片我们不难看到,样品吸收电流的应用几率小于1％。然而,样品吸收电流模式在某些方面,如在电子探针显微分析和电子束感生电流信号检测中的应用,有其独特的优点。在本文中我们将讨论样品电流模式的另一种用途。
In the SEM, a special specimen stage has been designed for transmitted electron image studies. The conventional transmitted electrons detector consists of scintillator, light-pipe and photomutiplier tube, but the system construction is complicated. In this paper, a new method to detect transmitted electrons is described. The 'Faraday Cup' was used as a detector only. The detecting process is incident electron beam passing through the specimen→the Faraday Cup recording transmitted electrons→ generating absorbed electrons→the signal being amplified with the specimen current amplifier→controlling CRT image.
出处
《吉林大学自然科学学报》
CAS
CSCD
1990年第3期62-64,共3页
Acta Scientiarum Naturalium Universitatis Jilinensis
关键词
扫描电镜
法拉第筒
透射电子像
transmitted electrons, Faraday Cup, transmitted electrons detector, TSEM image
