摘要
为了解决粗大调整误差下大口径光学平面镜的子孔径拼接检测问题,基于迭代梯度算法,建立了一套合理的拼接算法和数学模型,同时编制了拼接程序。结合工程实例,利用Φ600mm干涉仪实现了对Φ800mm平面镜的拼接测量。检测中,基于靶标对各子孔径实现对准,拼接所得面形光滑连续无狭缝。实验结果表明,利用迭代梯度算法可以高精度地完成粗大调整误差下大口径平面镜的拼接检测。
To accomplish the sub-aperture stitching testing for large aperture flat mirror under considerable adjustment error, we establish a reasonable stitching algorithm and mathematical model based on iterative gradient algorithm. At the same time, relative program is written for stitching. Combined with engineering examples, we measure a Ф800mm flat mirror with a Ф600mm interferometer in stitching method. In the measurement, we accomplish the alignment between sub-apertures with targets and the stitching result is smooth. Experimental results show that stitching measurements of large aperture flat mirror could be well down with the this algorithm under considerable adjustment errors.
出处
《激光与光电子学进展》
CSCD
北大核心
2014年第1期108-112,共5页
Laser & Optoelectronics Progress
基金
国家自然科学基金(61036015)
国家863计划(08663NJ090)
关键词
测量
光学检测
干涉测量
子孔径拼接
measurement
optical testing
interferometry
sub-aperture stitching
