摘要
大口径凸非球面子孔径拼接干涉检测中的各子孔径之间为离轴形式,各子孔径之间除了平移和倾斜变换外,还含有旋转变换,测量结果中不可避免地会出现参考面未对准的情况,当进行数据拟合处理时,需要把由未对准造成的误差去除。本文在平面检测的最小二乘拟合基础上,对拟合算法进行了改进,从而实现了离轴子孔径的拼接检测拟合。为了验证算法的有效性,采用Matlab对口径为1m的大口径凸非球面的子孔径拼接检测的拟合过程进行了仿真实验,实验结果表明,离轴式大口径凸非球面干涉检测的子孔径拼接可采用改进后的最小二乘法拟合而成,且拟合精度可达到0.0048λ。
When using an interferometer tests a large convex aspheric surface in sub-aperture,the subapertures and the mirror under test are off-axis.So when stitching the measurements,the full aperture map is got,besides the piston and tilt that are usual in plane testing,there is lateral misalignment need to be removed as well.Based on the least squared fit process of the plane sub-aperture testing,the stitching arithmetic is improved to apply to the sub-aperture off-axis testing.In order to prove the validity of the arithmetic,the Matlab is used to emulate the stitching process of sub-aperture testing for 1m convex aspheric surface.The results indicate that the improved arithmetic is effective,and its stitching precision can reach 0.0048λ.
出处
《光学技术》
CAS
CSCD
北大核心
2010年第2期182-186,共5页
Optical Technique
关键词
大口径凸非球面
离轴子孔径
拼接拟合
最小二乘法
拟合精度
large convex aspheric surface
off-axis sub-aperture
stitching
least squared fit
stitching precision
