摘要
利用激光干涉光刻技术制备大面积表面微结构的方法对探测器表面进行处理,实验与测试表明,此方法能够增加探测器对信号的吸收率及提高探测器的光电转换效率,达到提高探测器灵敏度的目的。
The laser interference lithography technique was used to prepare large area surface microstructure to process the detector surface. The experiments and tests show that the method can increase the signal absorptivity of detector and improve the photoelectric conversion efficiency of detector,and then improve detector sensitivity.
出处
《长春理工大学学报（自然科学版）》
2013年第5期65-70,共6页
Journal of Changchun University of Science and Technology(Natural Science Edition)
关键词
激光干涉光刻
微纳结构
光电转换效率
laser interference photolithography
micro-nano structure
photoelectric conversion efficiency
