摘要
目的研究台阶的形貌对台阶仪测试的影响,准确测试薄膜的厚度。方法分析制备台阶中存在的问题,针对这些问题设计了中轴线位置带掩膜条的掩膜板,并采用该新型掩膜板,在不同衬底上制备台阶,用台阶仪对薄膜的厚度进行测定。结果在薄膜中轴线附近做出的台阶,坡度陡峭,上下表面清晰。Mo衬底上制备出的薄膜厚度重复性较好;单晶硅衬底上制备的薄膜表面粗糙度较大;石英衬底上制备薄膜形成的台阶上下表面均较为平滑。结论使用新型掩膜板在石英衬底上制备出理想台阶,可较为准确地测试薄膜的厚度。
Objective To study the impact of the morphology of steps on the level meter measurement, and to ac- curately test the thickness of the films. Methods The problems in the preparation of steps were analyzed, the med- dle line strip mask was designed based on these problems, and the new mask was used to prepare steps on different substrates, and then the thickness of the films was measured by level meter. Results The steps near the meddle line of thin films had steep slope, and the upper and lower surfaces were clear. The thickness of the films prepared on the polished Mo substrate had good reproducibility; the films on single crystal silicon substrate had large surface rough- ness ; the upper and lower surfaces of the steps of films prepared on quartz substrates were the smoothest. Conclusion The use of new mask can help to prepare the ideal steps on quartz substrates for relatively accurate test of the film thickness.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2013年第6期113-118,共6页
Surface Technology
基金
中国工程物理研究院科技发展基金资助项目(2010A0301011)~~
关键词
薄膜
膜厚
边缘效应
理想台阶
粗糙度
thin films
film thickness
edge effect
the ideal step
roughness
