摘要
基于光反射原理搭建了平板玻璃厚度测量系统,通过成像镜头将线结构激光在平板玻璃上下表面的反射光在CCD光敏面上成双线像,利用数据采集卡采集图像光强随像素的分布曲线,通过对采集信号进行小波去噪、双峰拟合得到双线像强度峰值像素差ΔN,进而计算得出玻璃厚度。测量前先利用标准玻璃板对测量系统进行标定以确定比例系数k,再对不同厚度的玻璃进行实际测量,并与千分尺的测量值比较,实验结果表明该方法测量平板玻璃厚度可行有效,系统相对误差为0.01。
A flat glass thickness measuring system based on light reflection is built. By CCD imaging lens, the double line images of the line laser rClected by the up-down surfaces of the flat glass will form on the CCD photosurface. Then the distributed curve and data of the image light intensity with the pixels are acquired by the data e cquisition card. By the methods of wavelet denoising and doublet fitting, the pixel difference （AN） between the double line images is acquired, and then the flat glass thickness can be computed. Before measuring, the system is calibrated by using the normal flat glass to determinate the pr ~portionality factor （k）, and then, different thicknesses will be measured. The results compared with the milscale measuring value indicate the proposed method is feasible and effective with a relative error of 0.01.
出处
《半导体光电》
CAS
CSCD
北大核心
2013年第5期909-912,共4页
Semiconductor Optoelectronics
基金
国家自然科学基金项目(60977061)
秦皇岛市科学技术研究与发展计划项目(201101A072
201101A071)
关键词
线结构光
反射式
平板玻璃
小波去噪
像素
line laser
reflection-type
effective with a relative error of 0. 01. flat glass
wavel
t denoising
pixel
