摘要
为了提高大尺寸激光防伪商标全息母板制作的效率和精度,开发了以新型初级永磁直线电动机驱动的X-Y工作台,以工业控制计算机为上位机、TMS320F2812为下位机的高速光刻机,并采用动态曝光的工作模式,实现了高速高精度定位。解决了传统光刻机需要在静止状态下完成曝光的难题,光刻速度提高10倍,解决了制作大尺寸防伪商标困难的问题,较大地提升了激光全息防伪商标的制作技术水平。
In order to improve the precision and efficiency of big size laser holographic anti-counterfeit trademark motherboard production,the X-Y worktable as high speed optical lithography machine with new primary permanent magnet linear motor drive was developed,in which the industrial control computer was the upper machine,and the TMS320F2812 was the lower machine.The machine can reach high speed and high precision positioning with exposure and dynamic way.It can change the traditional lithography machine which needs to be done under the condition of static exposure work pattern,the lithography speed can be improved 10 times,and it can solve the problem of big size anti-fake trademark manufacture.
出处
《微特电机》
北大核心
2013年第11期16-19,共4页
Small & Special Electrical Machines
