摘要
针对目前小口径非球面零件在超精密加工中存在的加工效率和加工精度等问题,分析了现今小口径非球面超精密加工方法及其特点,提出了一种超精密金刚石车削和斜轴磁流变抛光超精密组合加工方法.其中小口径非球面斜轴磁流变抛光方法的特点是抛光主轴采用倾斜安装,并且抛光头由外部旋转抛光体和内部励磁装置两部分构成.通过开发新型的小口径非球面超精密复合加工装备,对小口径单晶硅非球面进行了超精密组合加工实验.实验结果表明工件的表面粗糙度R_a由车削后的9.1 nm下降到抛光后的3.2 nm,证明了该组合加工工艺是提高小口径非球面加工效率和精度的一种有效加工方法.
Aiming at the problem of low accuracy and efficiency in machining small aspheric compo nents, the existing ukraprecision machining technology and their characteristics for small aspheric sur face were analyzed. A combined machining process including ultraprecision turning and the inclined axis magnetorheological polishing was presented. The characteristic of inclined axis magnetorheological polish ing is that the polishing axis is inclined installed, the polishing head has a rotated polishing part outside and a fixed excitation part inside. A new type of ultraprecision equipment was developed, which in tegrates with the ultraprecision combined machining function, and it was used to process small monocrys talline silicon aspheric surface. The experimental results show that the surface roughness R of workpiece can be largely improved from 9.1 nm after turning to 3.2 precision combined machining is an effective approach to sion for small aspheric surface. nm after polishing, which proves that the ultra improving the production efficiency and preci
出处
《纳米技术与精密工程》
CAS
CSCD
2013年第6期479-484,共6页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(51175167)
江苏省科技计划资助项目(BE2011053)
常州市科技计划资助项目(CJ20120282)
关键词
小口径非球面
磁流变抛光
超精密车削
组合加工
small aspheric surface
magnetorheological polishing
ultra-precision turning
combined ma-chining
