摘要
采用化学气相沉积技术在四种不同沉积温度下制备了铝化物涂层,采用X-射线衍射仪、扫描电子显微镜和能谱仪研究了不同沉积温度下涂层的相结构、微观形貌和成分。结果表明,涂层的相结构、微观形貌和成分受沉积温度的影响明显。沉积温度越高,涂层越趋于形成均质的β-NiAl相,涂层表面多边形网格状形貌越均匀,网格内晶粒生长越密实。扩散区内富集大量的铬、钼和钨元素,其相应的析出物会形成扩散障碍层。
Four types of aluminide coatings were fabricated by chemical vapor deposition （CVD） at different deposition temperatures （950 C, 985 C, 1020 C and 1050 ℃. X-ray diffraction （XRD）, scanning electron microscopy（SEM） and energy dispersive spectroscopy （EDS） were used to investigate the phase structure, morphology and composition of the aluminide coatings. The results show that the phase structure, morphology and composition of the aluminide coatings are strongly influenced by the deposition temperature during CVD. The higher the deposition temperature, the easier the formation of pure β-NiAI phase. With the increase of the deposition temperature, the surface of the coatings became smooth and dense, while the ridges along grain boundaries approached to be flat in a certain extent. Large numbers of elements of Cr, Mo and W within diffusion zone can form a thin film layer as diffusion barrier.
出处
《腐蚀与防护》
CAS
北大核心
2013年第11期991-996,共6页
Corrosion & Protection
关键词
化学气相沉积
铝化物
温度
相结构
微观形貌
chemical vapor deposition（CVD）
aluminde
temperature
phase structure
morphology
