摘要
采用中心波长800nm、脉宽130fs、频率1kHz的飞秒激光脉冲对316L不锈钢样品,在高真空环境中进行了微结构制备研究。实验获得了飞秒激光对316L不锈钢的单脉冲烧蚀阈值;并分别对高于和低于能量阈值的激光在多次脉冲下激光能量的累积效应进行了实验研究。实验结果表明:高于阈值的单脉冲能量100μJ,随着脉冲次数的增加,分别获得了亚微米级激光诱导周期性表面结构(LIPSS)、微米级波纹结构和微米级锥状钉结构;低于阈值的单脉冲能量20μJ,在累积脉冲下也能获得LIPSS和微米级波纹结构。
We investigate microstructures on 316L stainless steel surface induced through using femtosecond laser with central wavelength of 800 nm and pulse duration of 130 fs at a repetition rate of 1 kHz in high vacuum. The single-pulse threshold of 316L stainless steel is obtained by experiment. The multi-pulse laser energy accumulation is experimentally studied with the laser fluences higher and lower than the single-pulse threshold, respectively. Experimental results show that with the laser fluence increasing, laser-induced periodic surface structures （LIPSSs） on the submicron scale, ripples and cone-shaped spikes on the micron scale are fabricated with single-pulse energy of 100 μJ which is higher than the threshold. And LIPSS on the submicron scale and ripples on the micron scale can also be obtained by multiple pulses with single-pulse energy of 20 μJ which is lower than the threshold.
出处
《激光与光电子学进展》
CSCD
北大核心
2013年第11期150-154,共5页
Laser & Optoelectronics Progress
基金
国家973计划(2011CB013000)
国家自然科学基金(50975128
50975129)
江苏省光子制造科学与技术重点实验室开放基金(GZ200714)
关键词
激光技术
超快光学
烧蚀
能量阈值
脉冲累积
316L不锈钢
周期性表面结构
laser technique
ultrafast optics~ ablation~ energy threshold~ multi-pulse accumulation~ 316L stainless steel periodic surface structure
