摘要
系统地进行了离子束强化真空沉积镀、射频离子镀和离子束强化射频离子镀3种镀TiN薄膜的实验,并对不同方法制备的TiN薄膜进行了性能测试与组织结构分析。研究结果表明,离子束强化不仅有提高沉积速率,细化晶粒,促进晶体择优取向的作用,而且可改善薄膜的附着力与耐磨性。因此可推荐用于提高耐磨性为目的的TiN镀膜生产上。
Experiments were conducted systematically for three kinds of TiN film plating,i, e. Vacuum deposition with ionic beam intensification, RF ionic plating and RF ionic plating with beam intensification.The properties and microstruc-tures of TiN films prepared differently were studied. The results show that the ionic beam intensification can not only increase the deposition rate, refine the grain size and expedite grains to preferred orientation, but also improve film's adhesion and wearability. It is therefore recommended to apply the technique to the practice of TiN film plating so as to improve its wearability.
关键词
离子束强化
镀膜
TIN薄膜
ionic beam intensification, vacuum deposit plating,radio-frequency ionic plating.
